Water assisted atomic layer deposition of yttrium oxide using tris(N,N′-diisopropyl-2-dimethylamido-guanidinato) yttrium(iii): process development, film characterization and functional properties - RSC Advances (RSC Publishing)
a), (b), (c) SEM images of Yttrium oxide prepared by Solvothermal... | Download Scientific Diagram
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